Magnetic levitation stages for planar and linear scan application with nanometer resolution1
نویسندگان
چکیده
منابع مشابه
a new type-ii fuzzy logic based controller for non-linear dynamical systems with application to 3-psp parallel robot
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ژورنال
عنوان ژورنال: International Journal of Applied Electromagnetics and Mechanics
سال: 2020
ISSN: 1383-5416,1875-8800
DOI: 10.3233/jae-209003